Adaptive optics; Aspherics; CMOS integrated circuits; Data processing; Electrodes; Light modulation; Light modulators; Liquid crystals; Mathematical models; Micromachining; Optical sensors; Optimization; Silicon

We present an overview of the results of our recent research in the field of adaptive optical components based on silicon microtechnologies, including membrane deformable mirrors, spatial light modulators, liquid-crystal correctors, wavefront …