Aspherical surface; Constant temperature; Deformable mirrors; Elevated temperature; Freeform optical elements; Freeform optics; Micromachined membrane deformable mirror; Temperature range

Micromachined membrane deformable mirror (MMDM) can serve as an "ad hoc" free-form optical element. To test the repeatability and stability of the standard MMDM, we have conducted the test of surface figure during multiple thermal cycling, test of …