CMOS integrator based lock-in pixel for heterodyne interferometry

Abstract

This article presents a prototype of a CMOS phase sensor for high accuracy (1 Angstrom) heterodyne interferometry. Switched integrators realization of a lock-in pixel for 4-bucket phase detection algorithm is described and illustrated by experimental results. Factors that limit the accuracy of this implementation and possible ways for its improvement are discussed.

Publication
Proceedings of SPIE - The International Society for Optical Engineering