Adaptive optics; Aspherics; Budget control; CMOS integrated circuits; Light modulation; Liquid crystals; Microelectromechanical devices; Micromachining; Mirrors; Optical sensors; Silicon; Viscoelasticity; Wavefronts

We present an overview of the results of our recent research in the field of adaptive optical components based on silicon microtechnologies, including membrane deformable mirrors, spatial light modulators, liquid-crystal correctors, wavefront …