Image processing; Interferometry; Light sources; Microscopes; Optical instruments; Profilometry; Wavefronts

Shack-Hartmann reflective micro profilometer

We present a quantitative phase imaging microscope based on a Shack-Hartmann sensor, that directly reconstructs the optical path difference (OPD) in reflective mode. Comparing with the holographic or interferometric methods, the SH technique needs no …