Incoherent illumination; Interferometric methods; Optical path difference; Optical profilometer; Phase imaging; Quantitative phase imaging; Shack-Hartmann wavefront sensors; Wave-front sensing

Shack-Hartmann reflective micro profilometer

We present a quantitative phase imaging microscope based on a Shack-Hartmann sensor, that directly reconstructs the optical path difference (OPD) in reflective mode. Comparing with the holographic or interferometric methods, the SH technique needs no …